MTEC

Medium Temperature Effusion Cell

VolkVac Instruments’ MTEC is optimized for evaporation of medium vapor pressure material. Common examples are metals Ga, Al, and Au. Transition metals such as Co and Fe can also be evaporated at moderate deposition rates of 0.1-1 nm/min the chamber depending on deposition geometry.

The design of the Ta wire heater and radiation shielding inside the MTEC is optimized for stable temperature control (±0.1 °C, depending on PID controller used) in the 400-1400 ° C range. The filament can come in regular, hot lip and dual filament winding configurations (cold lip version available for Al evaporation). Please consult VolkVac for specific recommendations for your application.

The most common crucible material is PBN due to its chemical inertness, low vapor pressure and clean outgassing in UHV as well as high thermal shock resistance. However, other crucible materials may be appropriate based on the required application. Please consult VolkVac for recommendations.
Majority of application do well with cylindrical crucible geometry (~1° wall taper) but conical crucibles (~10° wall taper, commonly used for doping applications) are available on request. Please consult VolkVac for recommendations.

MTECs can be supplied with an integrated water-cooling shroud, or as bare evaporators if customer already has a cooling shroud in place. Most evaporators can also be fitted with an integrated rotatable shutter, with manual or compressed air actuation. See table below for options.

MTEC - Volkvac Instruments | UHV Design
DesignMTEC
HeaterTa wire, PBN insulator
Regular/hot lip/dual filament options
Flange Sizes2.75” (DN40CF), 4.5” (DN63CF), Larger sizes on request
Temperature range300-1400 °C (max temp may be limited due to crucible material choice)
Outgassing temperature1500 °C
Bakeout temperature250 °C
ThermocoupleType C
UHV dimensionsSee table below
CruciblePBN, Al2O3, W, Ta, other on request
Cables200 °C bakeable, 20 ft
Option: CoolingIntegrated or separate water-cooling shroud
Water requirements: 5-15 °C, 1 l/min flow rate
Option: shutterIntegrated rotary Ta shutter blade, manual or pneumatic
Part NumberCF Flange SizeIntegrated water cooling?Can integrate shutter?Crucible volume (cm3)Filament optionsVacuum dimensionsODxLmin (mm)
MTEC-275S-140Yes1.5R35×175
MTEC-275WCS-140YesYes1.5R35×175
MTEC-275S-1040Yes10R, HL, D35×200
MTEC-275WCS-1040YesYes10R, HL, D38×200
MTEC-275S-2540Yes25R, HL, D38×200
MTEC-275S-3540Yes35R, HL, D38×225
MTEC-275-404040R, HL, D38×225
MTEC-275-604060R, HL, D38×225
MTEC-450S-3563Yes35R, HL, D57×200
MTEC-450WCS-3563YesYes35R, HL, D57×200
MTEC-450S-6063Yes60R, HL, D57×225
MTEC-450WCS-6063YesYes60R, HL, D57×225
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More Effusion Cells

Low Temperature Effusion Cell (LTEC)

LTEC - Volkvac Instruments | UHV Design

Medium Temperature Effusion Cell (MTEC)

MTEC - Volkvac Instruments | UHV Design

High Temperature Effusion Cell (HTEC)

HTEC - Volkvac Instruments | UHV Design

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