Transferrable Heating Stage

This transferrable sample carrier/heating stage can carry crystal substrates (10 mm X 10 mm version shown here) into a sputtering chamber. The heater and thermocouple are integrated into the sample carrier, such that when the sample carrier is loaded onto the deposition manipulator it makes the requisite electrical connections to the manipulator. The integrated PBN/PG heating element can reach a temperature of 1200 °C inside 100 mTorr Nitrogen atmosphere.
Transferrable heating stage - Volkvac Instruments | UHV Design

Past Projects

Triple Heater Deposition Manipulator

3 sample manipulator cutout1 - Volkvac Instruments | UHV Design

Transferable Heating Stage

Transferrable heating stage - Volkvac Instruments | UHV Design

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